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Contact Mechanics in Flexural MEMS Stiction

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作者:Yin Zhang ;Ya-pu Zhao
摘要:A variational method using the principle of virtual work (PVW) is presented to formulate the problem of the microcantilever stiction. Compared with the Rayleigh–Ritz method using the arc-shaped or S-shaped deflection, which prescribes the boundary conditi
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